KBڻ( KBڻ) ֱ ְ ¿ ұ 5% ̻ ű .
24 Ǿ迡 KBڻ 22 ֽ 613377ָ 5.92% ߴٰ ߴ. KBڻ 5% ̻ Ȯ ̹ ó̴.
ְ 3 ĺ ߴ. 9000뿡 ŷǴ ְ 2 ö 18650 , 52 Ű ġ. KBڻ 19 553744ָ ǹ ߰, ְ 90% ̻ 22 59633ָ ߰ żߴ. ֱ ŷ ܰ 17794̴.
KBڻ ű 濡 3б 밨 ڸϰ ִ δ. ü ֱ 3 ǻ 3б 159 173% . 32 78̻ , 28 ȯ ȴ.
ѱڿ ظ DPT(Dopuble Patterning Technology) High-K(ijн ) ü þ ִ. ݵü ü ȸ ԵǴ پ ݼȭй Ѵ. Ư, Z DRAM 25 ȯ 1б 45% 4б 70% 鼭 ݵü ü þ ٺô.
2б ݵü ü 2б ũ þ. DPT ǰ 52 164% ߴ. 2б ʾҴ LOW-K( Si ڸ ) HIGH-K 45, 27 ߴ.
Ű DPT þ ٺô. ̼ȭ DPT Ƚ þ, Zڰ 25 øµ ̾ 22(25 DPT 뷮 ) 굵 Ϲݱ ȭ ȴٰ . , Ϲݱ Z DRAM űԶ ڰ ̷ DPT High-K 뷮 ٺô.
ǻ 3 122̴. ְ ݿ ְ(PER) 15.8.
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