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28 1 55 1.2%(100) 12050 ŷǰ ִ. 2 ϱ ϴ 16% ߴ. 2 ٸ ŸŰ ̴ ϱ ֽ 17917(ֽ Ѽ 0.83%) żߴ.
ֱ ȣ ͵ ƴϴ. 206 24% ߴ. –88 ȯ, ͵ 134 ڸ ߴ.
ݵü÷ ̴ ǰ ü. ַ ǰ D ÷ Ǵ DPT(Double Patterning Tech) ü ACL(Amorphous Carbon Layer) ü. DPT ACL ü ݵü ̼ȭ ̴ ٽ İ ȴ. 48% 30% ϰ ִ. ֿ ó Z SK̴н.
ֱ ݵü ü ̼ȭ ϸ鼭 ǰ ϰ ִ. ü ũ 1б 380(2013 35%) ø ´. ̿ ʴ. DPT ACL 30 ̼ ̴ ǰ ݵü ü ̼ȭ ߽ 䰡 þ. 3б ijн High-K 翡 ű ǰϰ ִ. ǰ 20~30 ̼ ȴ.
̿ ǰ ' ' ŵ Ѵ. ü (WiseFn) ֱ 3 ǻ簡 ġ 603, 131̴. 3谡, ȯѴٰ ִ.
1 ڰ ūպ ΰ ִ ֽ Ұ ִ. Ұ ְ 9900̾. ٷΰ: [] 'ū' ΰ ִ ֽĵ
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