Zڰ þ Ը ȮŰ ְ ָȴ.
10 Ǿ迡 Zڰ 5 9 ذ յΰ ִ ߱ þ 忡 ݾ 100 δ. ȹ̾ 70 ξ ݾ̴. ߱ Ǽδ ִ Ը.
3(3D) V Ȯ븦 ÷ 忡 óϱ ؼ. þ ȭǸ ݵü ι ͼ Ʈ ȴ ͱ ٺȭ δ. Ե ڱ ϸ 50 ߰ ̴.
̿ Zڿ ŷϴ ݵü . üδ ũ, IPS, , Ʈ, ǿ, ̾ ǥ̴.
3D ?
ũ Ʈ ȭб(LP CVD) , IPS ö ȭб(PE CVD) ̴ַ. IPS İ(Etcher) Ѵ. ̾ źȭ Ǵ (Ceria Slurry) , ǿ̴ ö ϴ ּ(Asher) Ѵ.
3D ÷ô (V) 带 ´ ̴. ÷ú ȿ а ӵ ̻ . ݵü ھü մ 3D ÷ ڿ ø ִ. 3D ÷ İ Ŀ. Ư ȭ 2D ÷ 4̻ ԵǴ ˷ ִ. 3D ÷ ڿ , ü ָ .
ݵü ü, 1б ?
ٸ ü 1б . ü (WiseFn) ü δ.
IPS Ʈ, 1б ȯ ȴ. ̾ 364%, ǿ̴ 164%, ũ 98% ȴ.
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