þµ ְ ༼ ̰ ִ . 18 10 15 Ϻ 0.5%(100) 19700 ŷǰ ִ.
ݵü () Ǵ ȭм縦 غ ŵ״. ֱٿ 帧 ̾. 2б 187, 26% þ. 30% 52 ߴ.
̷ Ÿ(Ÿ – Ÿս) 16 1210% ø鼭, 88% 55 ߴ. γ ũ þ. 2б 16, 6873 ߴ.
Ͱ ְ ֱ ༼ . Ư 2б ǥ 7 ְ ϶ϱ ߴ. 19600 7 30% ̴.
ǥ ǻ ġ ص Ǯ̵ȴ. ȸ ǥ 2б , ǻ ġ صҴ. ǥϱ 7 13 ֱ 3 ǻ 7 2б 210, 55̴. ȸ ǥ ġ 11%, 5% صҴ.
üθ þ. Ư 2014 ϸ鼭, ְ ߴ.
̷ Ǿ ̾ ٺ ִ. ݵü ̼ȭ ӵǴ .
ݵü () Ǵ ȭм縦 ȸ DRAM ̼ȭ ü, Low-K( ), High-K( ), HCDS ü ϰ ִ.
ݵü ̼ȭ ̷ ؼ 뱤 ʼε ӵ Ű ϰ ִ. DPT(Double Patterning Technology) ̼ȭ ö ַ ǰ ִ. ̿ Բ ijн(Capacitor) Ǵ High-K( ) DRAM NAND Ǵ Low-K( ) 뷮 ϰ ִ.
2б ݿ ȯ(ֱ 4 б ջ) ְ(PER) 14.5.
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