ֱ ڰ ̾ ֽ ̰ ־ . 8 2 9 ̾ Ϻ 0.6%(50) ϶ 7940 ŷǰ ִ.
Ǿ迡 ڴ 26Ϻ ϱ 9ŷ ̾ ֽ 鿴. Ⱓ ż ֽ 155063ַ, ֽļ 0.46% Ը. Ⱓ ְ 4% ö.
̷ Ǿ ̾ ͼ ŵ ϰ ִ. ü (WiseFn) ֱ 3 LIG ǻ 3 ̾ 3464, 322̴. 3% , 3% Ը.
濣 ݵü ̼ ȭ ڸϰ ִ. ̿ ̾ CMP(Chemical Mechanical Polishing, ȭ ) þ δ
CMP ǥ鿡 ʿϰ ڸ ϰ, źϰ ݵü Ĩ ϱ ٽ ϳ̴. ݵü ̼ȭɼ ϴµ, ̸ źȭ 뱤 ϴ. ֱ ̼ȭ 鼭 3D NAND, FinFET Եǰ , ̿ CMP þ ִ.
̾ CMP ȭ ݵü ü, 2013 Zڿ ǰϱ ߴ. ̾ 2013 ִ.
̾ CMP ִ ϰ ִ ̴. CMP ϱ ؼ ؾ Ǵµ, ̾ CMP Ҿ ϰ ִ. ݵü ü ڿ ū ݸ, Ѵ.
ݿ ̾ ְ(PER) 10.30.
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