Z Ը ø Ǵ ü ָȴ.
к Zڴ ڿ 25 ˷. ̴ 24 1 þ Ը Ǹ ִ ڱݾ ̶ ߴ. ݵüι ڱݾ ̻ 15 ȹ̴.
Zڴ ýÿ ġ ȭȹ ִ Ը ݵü Ǽϰڴٰ ǥߴ. ڱݾ 156000, ڱⰣ ݱ 2017 Ϲݱ. 17 DRAM ڿ ߱ þ 3D NAND ε Ȯ ˷. Ҿ ý۹ݵü 14 ڰ ȹǾ ִ.
̿ ݵü ֵ δ. (www.itooza.com) Zڿ ŷϰ ִ ֵ غô. 6 ãҴ.
ũ ̴ ̴. 2228 197.5%, 412 415% Ǿ ߴ. ݵü ALD(Atomic Layer Deposition, ) Ѵ. ALD 3 پ ϵ β ڸ ݵü ʼ ´.
δ Ǿ ǿ 2134 41.6%, 393 91.7% þ ߴ. ǿ̴ Ʈ(Dry Strip) Ѵ.
ۿ ȭб(CVD) ϴ IPS, ũ, , ݵü 콺 δ.
ñ 1 Zڿ ݵü ް 3̴. IPS 10Ϻ 3 31ϱ 345 ǰϱ ߴ. 11Ϻ 3 31ϱ 98, 3 152 Ѵ.
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