ǥߴ.
ڰÿ ǥ 616 199.1% ߴٰ . 152, 110 ȯ ߴ. Ǿ ġ ġ ߴ. ġ 5.6%, 16% ڶ. ǻ ġ ֱ 3 ǻ翡 ǥ ġ հ̴.
DPT , ǰ High-K Low-K Ȯ . DPT ݵü ̼ȭ DPT(Double Patterning Technology) QPT(Quadruple Patterning Technology) 뷮 ߴ. DPT 2013 100 213 ȴ.
High-K( ) DRAM ̼ȭ 65nm() Ϻ ϰ ijн(capacitor) ʼ ִ Ϸ ū ̴. Low-K( ) DRAM NAND Ǵ . ȭ 翡 ǰ ν ް ߴ. High-K 2013 100 213, Low-K Ⱓ 6 160 .
Ŀ 弼 ӵ δ. IRڷῡ ű Ȯ ó ٺȭ ұ ؼ ȹ̴. R&D ڸ ǰ ٰȭ . ȸ 840, 200̴. Ǿ谡 895, 242̴.
ݿ ְ(PER) 20.9. ְڻ(PBR) 5.93, ڱںͷ 28.3%. 4б ݿǸ Ը ( -103) 2013 4б ܵ ġǥ ġ ȭ ũ Ÿ.
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