OCIƼ ַ ǰ 簳 ɷ Ȯ븦 ǥ . 9 2 10 OCIƼ ϰ 5100 ŷǰ ִ.
ݰ ڰÿ OCIƼ SiH4(Ƕ) 2 4Ϻ 簡Ѵٰ . OCIƼ 8 ش ߴ ִ. ߷ SiH4 Ǹ鼭 ȭ簡 ߱ ̴.
2 簡 Ǹ鼭 ȭ ̷ ̴. ̿ SiH4 ٽ δ. SiH4 188 9.84% ߴ. OCIƼ SiH4 ɷ 2000̴.
ֱ SiH4 Ȳ OCIƼ δ. ٿ ڴ(Dow Corning) ֱ ͼ SiH4 ˷. ̿ ȭǾ ݿ ŷǰ ִٰ ߴ. ٿ ڴ ɷ 4000 ɷ 37% ϰ ִ.
̿ Ҿ ߴ NF3(ȭ) 2 üڸ 簳Ѵٰ . OCIƼ 2010 10 NF3 üڸ Ѵٰ . ڱݾ 1724 2009 ڱں 78% شϴ Ը ڿ. 2011 1 üڸ , ް 2, 3 ڴ ߴ.
űԽü 簳 ް ؼҵƴٴ Ǯ̵ȴ. OCIƼ ǰ ȸ ް ȭư ڸ ȭ ȹ̶ . 2 ÷ OCIƼ NF3 ɷ 6600濡 7600 ̴. ٸ 2 ڸ ϰ ް ؼҵǴ 3 ڸ ȹ̴.
SiH4 Բ NF3 ȣϴٰ ߴ. NF3 ɷ 6.4% ݸ 9.8% ߴ. ݸ 7.2% δ. 2010 λ ߴٴ Ȳ ݿϰ ִٰ ߴ.
OCIƼ IRڷῡ NF3 ʰ 2012 31% ϶ δ. NF3 ʰ 15%, 8% ٴ ̴.
SiH4 ݵü LCD, ڸ¾ CVD(Chemical Vapor Deposition, ȭ ) Ǵ Ư. NF3 CVD ܷ ϴ .
̿ 3б ȣ δ. Ǿ OCIƼ 3б 15.9% þ 540 ߴ. 84 4100% ߴ. ǻ ġ ֱ 3 ǻ翡 ǥ ġ հ̴.
ְڻ(PBR) 1.71. 2009 OCIƼ PBR 4.52 ö, ȭ ְ PBR . ֱ 2Ⱓ ְ ִڻ(BPS) ó ŷǸ PBR Ѷ 0.99踦 ߴ. ֱ ְ PBR 1踦 Ѿ.
OCIƼ ݵü, LCDг, ¾籤 ϴ Ư . NF3 ó ȭ, NF3 귮 1 ̴.
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