ڰ ' Ʈ' Ұ Ʈ('') 5 ݵߴ. 4 2 42 2.5% 14000 ŷǰ ִ.
ڴ ȸ縦 ' Ʈ' Ұߴ. (ٷΰ [], ݵü ̼ȭ '') Ϻ Ÿġ 迭 нȭ(LP-CVD) 'ݵü ̼ȭ Ȯ ð, ֱ 5Ⱓ ͷ 5.2% ָߴ. ٸ ֿ Ḧ Ϻ ϱ / ȯ ½ ͼ ȭ ִ ũ ߴ.
1993 ݵü () ü. ַ ǰ нȭ(LP-CVD). Ǹ ȸθ Ĩ Ⱑ ϴ κа ʴ κ Ѵ. LP-CVD ݵü Ư ȭй ڵ ݵü ǥ鿡 (') ̳ ڸ Ű . ݵü ٽ, Z, SK̴н ű ڽ ǰ ֹ ̷. Ʈ ֿ ũ.
ȸ 1б 495 ⺸ 19% þ. Ͱ 615900 529900 23% 18% پ. ȸ 3 4 6 1б شѴ.
̷ Ҵ 1350 Ʒ ӹ / ȯ ش 1400 ̻ , ̸ ǰ ݿ ݿ мȴ. ִ Ϻ Ÿġ( 51.6%) ϴ 'Ʃ', 'ַ' 1300, 200 ⺸ 8% 18% þ, ǰ ǰ ܰ 123700 0.3% µ ƴ.
, 8 28 ( ) KBڻ 13.1% ϰ ִ. 3 5.9% ű 1 7.2%P ߰ ߴ.
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