ݵü ֿ Ŀ Zڿ SK̴н Ϲݱ 3D ÷ ڸ ϴ ָȴ.
6 к Zڴ Ϲݱ ߱ þȿ 48 3D ÷ ڸ ȴ. SK̴н 4б 3D ÷ δ.
3D ÷ö ÷ø Ѵ. ÷ð ̶, 3D ÷ô Ʈ ִ. 3D ÷ô ÷ÿ , ӵ, ȿ, 뷮, 鿡 ϴ.
3D ÷ ÷ , İ þ ȴ. ̱ ݵü ü ö̵ Ƽ(Applied Materials) 3D ÷ÿ ܼ ÷ 50~60%, İ 30~40% þ.
(www.itooza.com) ãƺ , İ ü IPS, , ǿ, ̾, ü OCIƼ, Ʈ, , ѼɹĮ, ֺ극 ǥ Ÿ.
IPS 3D ÷ ö ȭб(PE CVD) . CVD ũ PE CVD ȭб(LP CVD) µ, 3D ÷ PE CVD ַ δ.
ǿ̴ 뱤 İϴ Ŭס Ѵ. ̾ ȭ (CMP) ַ ǰ̴. , İ þ ǥ ϴ Բ Ѵ.
OCIƼ Ʈ ̴ Ư . Ǵ ü(precursor) ַ ǰ̴. ü ݵü ۿ ̼ȸθ ݼӹڸ ȭչ̴. ȭɹĮ ֺ극 İ Ǵ İ Ѵ.
ǰ 3D ÷ غ ȴ. ü (WiseFn) ϴ ǻ 캻 , OCIƼ 992 ۳⺸ 276% ȴ.
ѼɹĮ 633 124%, ֺ극 888 85% þ ȴ. () 53%, ̾ ( ) 35%, IPS 32%, 23%, Ʈ 8% ȴ. ǻ ֱ 3 ǻ簡 ߴ.
ٸ ü ְ Ͼ , ü ư 3D ÷ θ ľ ִ.
ڿ ֽMRI ŷµ Ÿ. ֽMRI 25 18 2% ߴ. δ 繫 ͼ强 5 Դ. ٸ ̼ ι ߴ.
ڸ ̾ ֺ극ΰ ̾ 16, IPS 14, Ʈ 13, OCIƼ 12, ѼɹĮ 11 ߴ.
ü ̼ ι 0 ߴ. ֱ ݵü ̼ȭ 밨 ź ̾ ް ִ ؼȴ. ְ(PER) 20 ̸ ̾(14.5), ֺ극(17.7) .
ֽMRI ַ ŷµ Ȯ ִ . Ƿ MRI ǰ Ȯ ֵ, ֽMRI ַ ش.
ֽMRI ַ ͼ强 繫 Ӹ ƴ϶ Ӽ ִ ° ְ ر Բ ǴѴ. ֽMRI 25 ְ ̸ 췮 ̴. 5 ΰ · Ÿ.
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