ߴ ø ϶. 25 1 4 3.7%(800) ϶ 2400 ŷǰ ִ.
ڰÿ ȭ ȭ ۾ Ѵٰ . 22 Ŭ ȭ θ ߱ ̴. ̿ 뵿û ۾ Ȱ 21ϱ ġ Ϸ 뵿 Ȯ ۾ 簳϶ ߴ. ߴ о 135 65.6%.
ġ Ϸ Ȱ ߴܵdz Ȱ ӵ δ. ϳ ߴ ش ǸŸ Ȱ ų ٺô. 3б ڻ 119 3б 178 67% ϰ ִٰ ߴ. ȭ ּȭ ߴ.
̿ ռ 3 3б ǥߴ. 3б 178 206% ߴ. 46, 39 ϸ ȯ ߴ. , , 3б ƴ.
HIGH-K ̲. HIGH-K 3б ϱ ߴ. 3б 62 5067% , 35% 32%P þ. ʾҴ LOW-K 35 ߰, DPT 88% þ 60 ŵ״.
ݵü () Ǵ ȭм縦 ȸ. ϰ ִ´. Ǵ CVD(Chemoical Vapor Deposition, ȭб) ü ȭ ߱ ̴. ڳ 2012 DPT(Double Patterning Technology) ֱٿ HIGH-K 縦 ǰϱ ߴ.
ش ̼ȭ Ѱ ִ. DRAM NAND ̼ȭ ̷ ؼ sh ʼε ӵ Ű ´. ̿ DPT ̼ȭ ϰ ְ DPT 簡 ǰ ִ. HIGH-K DRAM ̼ȭ Ǹ ij۽ ذϱ 뷮 ϰ ִ .
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