ֱ б οݰ( 'ο') Ȯ ̾ Ϸ ݵϰ ִ. 14 10 10 0.3% 4825 ŷ ̴.
8 ο 3б ̾ 1% ż 6.3% 7.3% ٰ ߴ. 3б 1% ŵ 1 ߰ߴ. ο Ư źбⰡ Ÿų Ѵ.
ݵü, LCD ݵü ȸ
̾ 1987 ݵü LCD 1 ȸ. Ϻ ݵü Ծü 1993 ݵü ߿ پ ݵü LCD ȭ ؿԴ. ݵü 40%, ÷ 23%, ݵü 34%.
÷ LCD ϴ ַ ϰ, ݵü CMP(), ݵü Ѵ. ݵü źȭ (CMP) ϴ (Ceria Slurry) .
ݱ ̾ 810 34% ð, 716200 13% þ. ٸ ܺ ȸ ( ) 13% پ 743200 ߴ.
ȸ غ 65% þ 1800~1900, 52% þ 190 ȴ. ߱ BOE, Z , LG÷ κ Ȯ ȴ.
¾籤 ȸ
̾ ȸ ݵü 濬 ǰ ȸ Ƽ 28% ϰ ִ. Ƽ̴ Ϻ źǰ īī(TOKAI CARBON) ̾ ȸ. īī Ƽ ֽ 35% ַ, 濬縦 Ƽ̿ ϰ ִ. Ƽ̴ ݵü ¾ ʼ ǰ (Hot Zone) 60% ϰ ִ.
߱ ްװ ¾籤 ħü ް ִ. ̿ Ƽ ġ ϰ ִ. Ƽ ݱ 175 ⺸ 64% ߰, Ⱓ 128100 82% پ.
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