• ġ, ߱  ַ
  • 20240405_ũ_

[º] ũ, ݵü ȸ

ܵ
| ' º' ˷ 췮 ߿ ܱ 'ū' ڵ Ȯϴ ֽ ڿ մϴ. Ϸ翡 ºθ ƴ, ú ɱǿ δ ȰϽñ ٶϴ.
ũ ְ ݵϰ ִ. ũ ְ ۳ 4 25300 11 11000 56% ޶ߴ. ׷ ۳ ݵ ũ 52 35% 15150뿡 ŷǰ ִ. ũ ֱ 6 ͷ ͷ ȸߴ. ũ ٽ αֽ Ȱ .



ݵü ȸ

ũ ݵü ü ַ ǰ нȭġ(LP-CVD). ݵü ݵü (Layer) ʿ䰡 ִ. Ⱑ ϴ κа ʴ κ нŰ ؼ.

LP- CVD ٸ ȭй ڵ ݵü ǥ鿡 ߷ ̳ ڸ Ű . ݵü ȸθ ׸ ¿ ۾̾. ׷ LP-CVD ¿ ȭп ݵü ǥ鿡 ׸ ִ.



ũ CVD ǰ ¿ ݵü ϴٴ ִ. ص ݵü 뷮 ݵü (Diffusion) ȣ Դ. ׷ ݵü ̼ ݵü δ ϴ. ݵü ̼ϼ ؾ Ѵ. ׷ 뵿 ȣ Ѱ谡 ־ CVD üǰ ִ. ݵü ̼ȭ ũ ݵü ԰ ִ.

ֿ Z üڰ ݱ⿡ ߵ ũ 3б⿡ ߴ. ũ 3б 186 46% ߴ. ҷ 3б ͵ 78 46% 42 ƴ.

ֱ ܱ ż

ܱ ۳ 7 ũ ֽ ŵϱ ߴ. ũ ܱ ۳ 7 10% 11 6% ϶ߴ. ׷ ֱ ܱ Ÿŵ ޶ ̰ ִ. ܱ 4Ϻ ŷ ũ ֽ żϰ ִ. ũ ܱ 6% 8.4% ϰ ִ.

KBڻ ũ 8.2% ִֿ. ġڹ 8.1% ϰ ִ. ũ ִ Ư ũ 37.6% Ȯϰ ִ.

ֽMRI м , 1%

ڰ ֽMRI м ũ ŷµ 25 23 ü 3( 1%) ߴ.

ֿ ϸ 繫 ̴. Һ ͼ ɼ .

ֽMRI ڿ ü ǽð м . MRI ͼ强 繫 Ӹ ƴ϶ Ӽ ִ ° ְ ر Բ ǴѴ. ֽMRI 25 ְ ̸ 췮 ̴. 5 ΰ ׹ · Ÿ.





ƮƮ ũα (2) ֱֱ(0)
:
|

 Ѹ ( 0)

ϴ. ù° ּ.
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05 / 17 15 : 22

ũ 084370

47,350 100 , 0.21 %

ֽMRI м

ڸŷµ
̼ offoffoffoffoff

13

/ 25

 onononoffoff
繫 ononononoff
 强 ononoffoffoff
 â ononononoff
* ֽMRI 췮 : ּ 15 ̻
* 3 ̸ м Ⱓ   ª Ϻ ٸ ֽϴ.
20240405_ũ_

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