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home ֽ м

[º] ׽, ݵü

ܵ
| ' º' ˷ 췮 ߿ ܱ 'ū' ڵ Ȯϴ ֽ ڿ մϴ. Ϸ翡 ºθ ƴ, ú ɱǿ δ ȰϽñ ٶϴ.
׽ ְ ϶ϰ ִ. ׽ ۳ 9 4750 ְ ϶ ݵ 2 1100 2 ̻ ְ ݵߴ. ׷ ٽ ְ ϶ ۵ ֱٿ 52 ְ 25% 7540뿡 ŷǰ ִ. ׽ ֱ 6 ͷ ȸߴ. ׽ ְ ٽ ݵ .



ݵü ȸ

׽ ݵü ȸ. ȭ(CVD) ַ ǰ̴. ݵü ũ ȸθ ˻縦 ϴ İ . ݵü 忡 ϴ 77% ϸ 9%, ˻ 14%.

ݵü ݵü (Layer) ʿ䰡 ִ. Ⱑ ϴ κа ʴ κ нŰ ؼ. CVD ٸ ȭй ڵ ݵü ǥ鿡 ߷ ̳ ڸ Ű . ݵü ȸθ ׸ ¿ ۾̾. ׷ CVD ¿ ȭп ݵü ǥ鿡 ׸ ִ.



CVD ǰ ¿ ݵü ϴٴ ִ. ص ݵü 뷮 ݵü (Diffusion) ȣ Դ. ׷ ݵü ̼ ݵü δ ϴ. ݵü ̼ϼ ؾ Ѵ. ׷ 뵿 ȣ Ѱ谡 ־ CVD üǰ ִ. ݵü ̼ȭ ݵü ԰ ִ.

ؿ CVD ȭ

CVD ַ ؿ Կ Դ. ̱ ö̵Ƽ, Ϻ ϷƮ ؿ ü ۷ι ݵü ؿԴ. ׷ ֱ SK̴н CVD ä CVD ȸ ߴ. CVD ȸδ ׽ ܿ ũ, Ʈ, IPS ִ.

׽ ۷ι CVD ü غ ۷ι 鿡 ͷ PER ŷǰ ִ. ϸ ͷ ̳ PBR ŷǰ ִ.



ٸ ݵü ݵü ڿ ũ ޴ ̴. ֱ Zڰ ݵü ڸ ݵü ü ְ ϶ߴ. ֱ ؿ õ 5 ʱ⹰ Z ÷ ޸𸮿 ÷̰ äõ ʾҴٴ ũ.

Z ݵü ڰ ݱ⿡ ߵ ׽ 2б 278 70% ߴ. 忡 Ծ ͵ 14 157% 36 ߴ. ׽ ̷ 嵿Ȯ ǽ İ(Dry Etcher) ¾ CVD ȭ ǰϰ ִ.

ֱ ܱ ż

ܱ 2 ׽ ֽ ŵϱ ߴ. ܱ ŵ ׽ ܱ 1.7% 0.9% ϶ߴ. ׷ ֱ ܱ Ÿŵ ޶ ̰ ִ. ܱ 19Ϻ ŷ ׽ ֽ żߴ. ܱ 1.0% ٽ ϰ ִ.

ֽMRI м : 9%

ڰ ֽMRI м ׽ ŷµ 25 17 ü 163( 9%) ߴ.
߰ ϸ 繫 ̴. Һ ȭǸ ͼ ϶ ɼ ִ.

â¿ ޾Ҵ. ֱ 4б 帧 (-) бⰡ ־, ׿帧 (-) ģ ݿƴ.

ֽMRI ڿ ü ǽð м . MRI ͼ强 繫 Ӹ ƴ϶ Ӽ ִ ° ְ ر Բ ǴѴ. ֽMRI 25 ְ ̸ 췮 ̴. 5 ΰ ׹ · Ÿ.





ƮƮ ũα (3) ֱֱ(0)
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05 / 14 15 : 32

׽ 095610

22,700 50 , 0.22 %

ֽMRI м

ڸŷµ
̼ offoffoffoffoff

13

/ 25

 onononoffoff
繫 ononononoff
 强 ononoffoffoff
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* ֽMRI 췮 : ּ 15 ̻
* 3 ̸ м Ⱓ   ª Ϻ ٸ ֽϴ.
20240405_ũ_

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