ǻκ ȣ ְ ¼. 9 1 24 4.6% 9750 ŷǰ ִ.
̳ ݵü ̼ȭ ǰ ȿ мߴ. ݵü ٽ 뱤(Lithography) Ǵ Amorphous Carbon Layer (ACL: ź ڸ) ü ַ ϰ ִ.
"ACL Ͽ ݵü ű 뱤 Double Patterning (DPT) ü ߿ ߰, 2б ó Zڿ ǰ ߴ"鼭 "DPT ݵü 62nm > 45nm > 35nm ̼ȭ ʿ ݵ ʿ ̰ Ư 30nm ϰ ֱ 䰡 "̶ ߴ.
̾ " ̵ ʿ ϴ High-K ϴµ, 䱸 Ϸ߰ ٸ ִ"鼭 " ȭ ̷ ÿ 4б "̶ ߴ.
DRAM Ư ߿ Ҵ ij۽(Capacitor)̸, ̸ ϱ ؼ High-K ᰡ ʿϴ.
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