• ġ, ߱  ַ
  • 20240405_ũ_

[ֽ] 𿣿 4%衦ǰ + ̼ȭ ?


𿣿 ǻκ ȣ  ְ ¼. 9 1 24 4.6% 9750 ŷǰ ִ.

̳ ݵü ̼ȭ ǰ ȿ 𿣿 мߴ. 𿣿 ݵü ٽ 뱤(Lithography) Ǵ Amorphous Carbon Layer (ACL: ź ڸ) ü ַ ϰ ִ.

"ACL Ͽ ݵü ű 뱤 Double Patterning (DPT) ü ߿ ߰, 2б ó Zڿ ǰ ߴ"鼭 "DPT ݵü 62nm > 45nm > 35nm ̼ȭ ʿ ݵ ʿ ̰ Ư 30nm ϰ ֱ 䰡 "̶ ߴ.

̾ " ̵ ʿ ϴ High-K ϴµ, 𿣿 䱸׿ Ϸ߰ ٸ ִ"鼭 " ȭ ̷ ÿ 4б "̶ ߴ. 

DRAM  Ư ߿ Ҵ ij۽(Capacitor)̸, ̸ ϱ ؼ High-K ᰡ ʿϴ.






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05 / 08 15 : 31

𿣿 092070

22,250 200 , 0.89 %

ֽMRI м

ڸŷµ
̼ offoffoffoffoff

12

/ 25

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繫 ononononoff
 强 onononoffoff
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* ֽMRI 췮 : ּ 15 ̻
* 3 ̸ м Ⱓ   ª Ϻ ٸ ֽϴ.
20240405_ũ_

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