[ ڵ]
ǥ ġ ڻ ѱڻ 1 ũ 2%(265247) ߰ ߴٰ ߴ. ̷ν ֽļ ü 10.73% شϴ 1423127ַ þ. ѱ ŷ ־ 10% 鿴?
<>̼ȭ Ȯ뿡 ִ = ũ ݵü Ǹ ü. ݵü ݵü ȸ , Ǹ ݵü غܰ ۸ Ĩ , ˻ϴ ܰ ̿Ǵ ǹѴ.
Ϲ ݵü ܰ ( ), İ(), ˻Ʈ зȴ.
[1] ݵü
(ڷ: )
ũ ַǰ ̰ų Ϸ ݵü ϰ ִ оߴ ݵü ȭб оߴ. ȭб(Chemical Vaper Deposition "CVD") ȭй ڵ ǥ鿡 Ͽ ̳ ڸ Ű ݵü ٽ ̶ ִ.
[2] ַ ǰ ý
(ڷ: ũ)
ǰ ũ Zڿ ̴н D (NAND) ̼ Ȯ , ַǰ (LPCVD) ö(Plasma) 䰡 ϰ ִٰ мߴ.
̼ȭ ݵü ϴ ȸ (ȸ ) ٿ 鼭 ݵü Ĩ ũ⸦ ̴ ۾ Ѵ. ü ̼ȭ ϴ ݵü ̰ ̼ȭ ϱ ̴. ũ LPCVD Plasma ̼ȭ , Ÿ ǰ ϵ پ κ ӵǰ ִ.
Ӹ ƴ϶ 11 븸 (Winbond)κ 89( 9.5%) Ը ű ָ ´. ̴ 5 ũδн(Macronix ° ؿ ַ, Zڿ ̴н ַ ̷ ؿܷ ٺȭϱ ߴٴ ȣ Ƶ ִ. ũ ܿ 븸 չݵü ü ű Ȯ ̴.
, Zڿ ̴н ְ ̼ 3040 D ϰ ְ, Ϻ븸 ü 5060 ǰ ϰ ִ. 츮 ü ̼ȭ 20 մ ϰ ְ, ̸ Ȯ ؿ ߰ ڴٴ ħ̴.
<> ְ= Z, ̴н κ ֹ ð, ű Ȯϸ鼭 ũ 2009 Ĺݺ ް ñ ߴ. 3б ȯ 1087, Ͱ 282, 255 ߴ.
[3] ũ
(ڷ: )
ɸ° ְ ȣ ̴. 3Ⱓ ڸ ʳ ǽߴµ, Ǹ ְ ϴ 758.7% ̷ο ͷ . Ⱓ ڽ200 39.7% · ߴ.
[4] ְ
(ڷ: ̹ )
<>强, ÿ = ڿ ü м X-Ray , ũ ŷµ 25 22 ü 17 1% ũƴ.
[5] X-Ray
(ڷ: )
ֿ ϸ 繫 ̴. Һ ͼ ɼ . ְ ְ 30% ΰ ŷǰ ִ. X-Ray ݿ ǰ 'ظż' Ȳ̴.
X-Ray ͼ强 繫 Ӹ ƴ϶ Ӽ ִ ڿ ְ ر Բ ǴѴ. X-Ray 25 ְ ̸ 췮 ̴.
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