OCIƼ(036490)
ٽǥ : ݵü,LCD Ǹ 귮, һ(HF), ȯ.
ھ̵
1. ݵü ¾籤 ȣȲ .
2. 30% ̻ ͷ.
3. - Ȯ - â - ȯ .
4. AMOLED Ȯ .
OCIƼ 1982 ݵü, LCD 꿡 ̴ Ư ü. 2008 OCI 迭 Եư, 2010 7 ȣ ҵż翡 OCIƼ ߴ. ֿ ǰ ȭ(NH3) Ƕ(SiH4) ȭ 50%, 10%. ǰ κ(99%) ϰ ־ ȯ ½ ͷ Ѵ.
Ȯ ް
OCIƼ 2007 ߰, ̿ Ͱ ͵ þ. κ ´ 2008 ̾. ̴ ǰ ̸ ־ ̴.
[ǥ1]& Ʈ
(ó: )
ȭҿ Ƕ ݵü, LCD Ǹ ʼǰ
ַ ǰ ȭҴ ݵü CVD(Chemical Vapor Depositon) ϴ Ư. Ǹ ۴ ̵ 帣 ʴ´. ۿ ̹ ǥ鿡 带 ֵ ش. ǥ鿡 ϴ ũ ȭ 2 µ, ȭ ٷ CVD ̴.
[1]ȭҿ Ƕ
(ó: Ȩ)
CVD ȭй ̿ ۳ LCD , پ Ư ϴ Ѵ. ̶ ̳ ſ β ž ϹǷ, ȭй · ϴ Ѵ. Ǵ è(Chamber) ϸ, ǰ CVD è ܷ ϴ ȭҴ. ȭҴ CVD Ͼ ġ ûҺο ϴ CVD Ǵ ݵü, LCD, ¾籤 ݵ ʿϴ.
Ƕ ۿ ȭ(SiO2) ʿ . ȭ ݵü ȸθ ִ ũ ǥ ȣϴ ȣ ȴ. Ƕ Ҹ µ Բ ־ָ ȭй ȭ ȴ. Ƕ ݵü Ӹ ƴ϶ ¾籤 ʼ ̸ ڸ ¾ Ǹ ڸ ϴ ε ̿ȴ.
* ڸ ¾: ¾籤 ϴ Ǹ ִ ¾. Ǹ 뷮 , ȿ ٴ ִ. 2010 ü ¾籤 20% Ѵ.
¾籤 ¾ Ǹ 䰡 ް ϰ, Ʈ IT ݵü 귮 þ鼭 ȭҿ Ƕ þ ִ.
3 4 3 ϰ..2013 NH3 ɷ 2 Ȯ
2006 . 2008 NH3 ɷ 2500濡 4500 ÷Ȱ, ϷDZ ߰ ȹ ǥߴ. 2011 3 4 3 ϰ յΰ 4 1,2,3 ϰֱ 6 Ұϴ. ϼǸ ȭ ɷ 4500濡 ߱ 1000 , 9500 þ ȴ. ߱ 2012 ̴.
[ǥ2] Ȳ
ڻ걸 Ʈ Ȯ ִ. ڻ걸 Ʈ 캸 (ڻ)-(ں)-(ڱں) 迭 ְ, ڻ κ ڻ̴. ں ڱں ä ȹ ִ ں̴. ڻ ں ٴ ڱں ä, ä Ȱ ÷ȴٴ ǹ̴.
OCIƼ ڱں Ը Ѿ Ը ؿԴ. ̴ 濵 Ȯ ̴ Ϸ, ̷ â ִ ڰ ִ Ȯ ʿ䰡 ִ.
[ǥ3]ڻ걸
(ó: )
庮 ɷ 30% Ѵ ͷ
OCIƼ ڴ ° ɷ̴. ȭҿ Ƕ Ҽ . ǿ ȭ ǰ 20% Ĺ, Ƕ 30% Ĺ ϰ ִ. 2008 Ϲݱ ȯ 40% ͷ ְġ ߰, ȯ ϶ ڿ ¾籤 Ư 䰡 30% ͷ ϰ ִ.
Ư ִ ó 츮 ġ ܱ ü Ƴ ְ, ȭ ϴ Ұ Ƕ ٽ ϴ ߰ ִ. ݸ ̱ Air Product Ϻ ī OCIƼ ͷ ȴ.
[ǥ4]ͷ Ʈ
(ó: )
OCIƼ ͷ ĥ ִ ֿ һ(HF) ݰ ȯ̴. Ư 2005 ͷ ݺٴ ȯ ΰ . ̴ ǰ 99% ǰų ü · ǸŵDZ ̴. ü̶ ǰ Ǵ ¸ Ѵ. ȭҿ Ƕ ݵü LCD, Ǹ ַ Ǵ ǰ DZ ü зǸ, ȸ ڿ Z, OCI 50% ̴̻.
[ǥ5]&ͷ&ȯ
*ȯ ų , HF .
(ó: , ѱȸ)
AMOLED
ȭҴ CVD ݺɼ 뷮 þ. OLED LCD CVD 2 ̻ ؾ ϹǷ ŭ ȭҵ ʿϴ. ѱ Zڿ LG÷̴ AMOLED 忡 5Ⱓ 20 ̻ ȴ. AMOLED ϰ 䰡 þ OCIƼ ȴ.
Ա ũ
OCIƼ 帧 Ȱ(+), Ȱ(-), 繫Ȱ(+) ̰ ִ. ü Ȱ ̴ ϰ, ڶ ڱ 繫Ȱ ڱԸ ÷ ִ. 2010 Ȱ 950 â߰, 200 ߰ 1130 ߴ. ܺ Ա Ȱ ϰ ִ 繫 ʼ. Ա , ں, 帧 繫 Ѵ.
[ǥ6]帧ǥ
(ó: )
2010 ä 2550 Ա 76% 1950̴. ڻ Ա ϴ ߵ 37% Ÿ ʴ. Ϲ Ա 30% ̸̸ ϴٰ . Ա ϰ , Ա Ȱ âϴ ڻ Ա 2008 50% . 2010 787 ں 63 13迡 شѴ. ̴ ̴ ں 13 ִٴ ǹ̷ ټ پ ū Ѵ.
[ǥ7]Ա
(ó: )
ں(ä+ڻ-ä) 601 ݼڻ 86 ̴. ں Ȱ ʿ ڱ ں شϴ ݼڻ ϴ ϴ. ȸ ڴ ⼺ ȭ äǰ ں þ, ó Ȯ ϰ ִٰ ߴ.
OCIƼ ¾籤 LED ָް ִ ̴. ǰ 庮 ߰ ̰ ġ ÷ ִ. , ӵ 뿡 ġ Ѵٸ ݿ ְ Ա Ȱ ڿ δ ִ. Ȳ, 밡 Ǵ ؾ ڴ.
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