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| CVD,ݵü

Ž

: ׽
ۼ : ġ
Ž : 2009. 12. 17 ()
: ݵü PECVD ü
ðѾ : 652 (12/17 13,850 )
ں : 23.5, ׸鰡 500


Ž泻

׽ 2002 Ǿ ʱ⿡ PECVD ReGen(߰ Ͽ Ǹϴ ) ַ , ⼭ Ͽ츦 ü PECVD߿ ϸ鼭 2007 300mm PECVD ̴н ǰϸ鼭 ü ޱ ߴ. ׸ 2009 2бʹ ̴н ƴ϶ Zڿ ϱ ó Ȯϱ ߴ. (2009 3б ó ̴н 49%, Z 30%, LG 5%, Ÿ ̴.)


ǰ 캸⿡ ռ 캸ƾ ݵü ü ڰ ȭ̴. ݵü ھü Fab , ġŲ ũ . ݱ⸦ 1ü Zڸ ȭ Ÿ ߴ. 200mm Fab ޴ɷ Ű ߾ 300mm۸ ϰ ̼ȭ ۵Ǹ鼭 ̼ȭ ڸ 20% ޴ɷ ų ְ Ǿ ̴. ܰ迡 Fab Ѵٴ û ް ߻ϱ ü ֵϸ鼭 ϱ ܰ谡 ̴. (ġŲ ؿܾü Fab Ȳ̴.)

ݵü ھü ڹ ̼ȭ ڰ ɼ ֱ Z (ݵü ƴ϶ TV, LCDг  ̷ Ÿ) ȿ ߽ϴ ɼ . 2010 ڴ ̼ȭ ְ ɼ ݺδ ȭ ǴѴ.

̼ȭ ڸ Ѵٸ غ ִ κ ִµ PR, 뱤 , İ(ETCHER), , (CVD)̴. ׷ PR̳ 뱤/ ȭ ο ص Ϻü ð ɸ δ. 񿩼 κ ȭ κ̸ ܰ谡 (CVD)̴. ׷ ܰ躰 Ǵ Ʋ CVD ؼ Ǵ ġ ǰ ƴϴ.


PECVD ACL(Amorphous Carbon Layer) ϴ ȸ PECVD ACL PR Carbon źȭȭչ ϴ ̴. ̼ȭ ɼ PR β İú ߰ Hard Mask ߰ ؾ ʿ伺 Ǿ. ACL Ǵ Hard Mask 簡 ϴ ACL Ǵ CVD̴(70 Oxide, Nittride Ǿ 60ʹ ACL ַ ̷). ACL Ǵ ٸ Hard Mask ϴ 캸 PRβ ҽų ־ ü ְ İ ú ̼ȭ ɼ ִ ̾ þ ȴ. (ݵü 뱤İ ܰ谡 ݺϰ Ǹ ܰ谡 ݺ ʿ ̾(ȸ) ܰ迡 ȴ.)

̼ȭɼ 䰡 2б Z ߻ϰ ִ. (Z 2б 18.5, 3б 51.2, ̴н 2б 28.0, 3б 74.0) ݱ ̴нκ 300, Zڷκ 200 ָ ϰ ִٰ Ѵ.

PECVD Dry Etcher Stripper ߿ 1 ׽Ʈ ǽ ̴. ʹ ⵵ ϰ ִ(̴н 100). İ ַ İ ַ Ľİ ̼ȭɼ 漺İ е Ϻ ǽ üǰ ִ ߼̴.

HF(һ갡) ̿ ǽ İ Ͽ ׽Ʈ ̴. ̼ȭɼ ö ̿ ԰ ٷ ö ԵǴ ִµ, ö ܴ Ű 찡 ߻ϰ ȴ. ¿ PR ϰ Ѳ ó ִ Spinel̶ ׽Ʈ ̴. ǽ İŭ ű 並 ũ ϰ ̼ȭ Ǵ ڷ 䰡 þ ִ κ̴. ó ǰ ݵü ̼ȭ ڿ ´ ǰ̾ ⵵ δ.

׸ ڸ ¾ PECVD ߿ (2007)ߴµ ̿ η ũ ߴ. ̹ϰ ߻ϰ ֱ δ ɼ ִ. 2010ĺ R&D ְ ۵ ϰ , Ư ߱ 1 1fab ĢϿ ڰ ũ þ Ǿ Ⱓ Ÿ ϰ ִ.

Ư ¾ڿ ־ ϴ 50% Կ Ѵٸ Ը 300̻ ū Ը ̶ Ѵ(ֱ ߱ ̷ LCD ݵü ü Ž ̷ ⸦ ־ 絵 ߱ 1 ַ 300 ϰ ־). ü ߿ ü ü Pilot Test Line ּϾ 簡 ϱ ߱⸸ Ѵٸ ɼ ־ δ.

̴ PECVD 340, Dry Etcher+Stripper 100, Regen 70~80, ֶ ι 80, ߱ 300̻ 800̻ ǥ ϰ ִ. ⼭ ֵ ߱ ֶ ι ֿο ū ̸ ̿ 䰡 ʿ δ. (ֶ δ б⺰ 10 ̷ Ը Ÿ ü 3б ִ.) 簡 ǰ 帧 Ȯ ´ ǰ̾ ɼ ϴ.






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