п ϷƮ Ž ȸ ܼ ϰ Ǿϴ.
⼭ ְ帧 繫 Ȳ dz ؼ ϰ ϵ ϰڽϴ.
I. 湮 簳
1. 07 5 18 Ϻ ְ帧
ܱ 1 36%̻ ȲԴϴ. ðѾ 1,089Դϴ.
簡 ݵüȸ̱ Ŭ ϱ ,
ֱ 4Ⱓ ̸ ϰ ֽϴ.
̷ ̸, ̷ Ǵ ʿմϴ.
3. 系
- ݵü ۸ ȭ ϴ Diffusion Furnance
۸ ̳ ϴ LP()-CVD ϴ ȸ
- , Ÿġ( Ÿġ), 濤Ʈ( TEL)
- б : ̱ 27.59% / Ÿġ 26.67% / ϳ 7. 19%
- 3 ̸ ߰ ؼ ۳ ִ 350/250/100 ,
3 꿡 ߰ 100 900 (ݹѾ 89)
II. ǰ
1. Ÿġ
- 94 Ÿġ ü 95 ǰ/Ź/Ź ü
- Ÿġ ǰǸſ ֿ, ü ǰɷ±
- ü Ǵ ܵ Ȥ Ÿġ ַ ϴµ,
̴ 忡
- Ÿġ 忡 ü ϱ⺸ٴ 簡 ʿ
ݵüü A/S ñ ó ʿϰ,
üɷ ͺٴ ϸ鼭 ŵδ ȿ ŭ.
- ִ Z å ̸, Ű Ϻη Ÿġ
- " ܵ+Ÿġ " : TEL = 55% : 45% ϸ, ܵ ִ 5 vs 5
- 3% Ÿġ ξƼ
- Ÿġ ̻ 2 İߵǰ , ̻ȸ Ϻ ϱ
2. Zڿ
- Z ȭ å ȣϿ Z ̱ ȸ â
- 翵 Z 濵
- ǰ ǰ ڿ ڿ ʼ
3. ̸鼭 ϴ
- Z/̴н ó , Ÿġ , A/S ȭ ̷.
- ݵü Ư α ϱ ؼ ̿ ڰ ʿϸ,
ѹα ݵüü ü ڸ.
- Ÿġ Zڿ R&Dδ ּȭϴ .
- Ÿġ ڿ 踦 ó 谡 ɼ .
- ʱ A/S δϴٰ ȭ ϸ鼭
- ݵü ġ Ը ۾Ƽ ں
( ڻ걸 ڻ , , )
4.
- Ÿġ 谡 ǰ ݵüü ġ ϸ,
( R&D ϸ鼭) ϴ
- 泲 õȿ 1,990 Ը ϰ ִ Ȳ
3 ȭ 2,000 Ը ű ϰ ü ġϱ غ.
(ɷ ̳ ɷ 2̻ ,
Ժ 45 100 ں ϸ, Ϸῡ 1 ܿ )
- 簡 ɷ
ι ̻ ϴ ߿ û̶ Ǵ
5.
- ֱٵ ݵü ް D ʴ 70%̻ ϶ϸ鼭,
ݵü ݱ Ȳ ҾȰ Ȯ
- Ϻ 븸ü ° ɷ ȭǸ鼭 ſ ݵüü е Ȯ.
- Ÿġ 븸̳ ߱ ȸ簡 Ƿ,
Ÿġ 谡 ۿ Ÿü鿡 õô
( ü ؿ̳ܰ ؿܹο )
6. İ å
- ó 1õ Ѿ鼭 ̸ ϸ鼭 ڿ ǽ.
(ô ̻ȸ İ õ)
- ͼ ؿ ټ , Ŀ 缺 Ǵ
- 翡 ؼ Ÿġʹ ϰ ü ǴѴٰ
(ڻ Կ ȹ )
7. 纻 湮 ְ
- 簡 ϰ
- 嵵 ȵǼ ǹ ϰ, ϰ
- ̶ ٴ ҳ 繫ǰٴ
- ް ڸ ̰ ü ְ ټ ϴٴ
III. 翡
- ̳ ɷ Ȯ, Ÿġ ڿ Ȯϸ鼭
ҾҸ ϴ
ٴ ִٴ
per 12 Ȳ per 8.26 Ѽ ƴ϶ Ǵܵȴ.
- ֱ ְ ܱ ߰, ݵüü Ȳ Ȳ ɼ
- رԸ ӵ ϴ ذ ְ ɼ
- õ ǰ ̾
Ⱓ ɼ Ƿ ܱ ְ żϴ ڱȸ Ǵ
....^^
ȭ ʸ¥ ʻ춧 պ ҿð νð 5ð ɸ鼭 龿 ֽ 10и ϰ 0.1ʸ μ ɱ 湮 ϴ ü ϴٰ մϴ. ߿Ѱ ƴѵ ϴ ƴ϶ ٴ ȸ Ǵ ϴ° ? ^_^
м մϴ