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Ƽ,Ͱ ڻ

| Ƽ,ݵü

Ƽ ݵü ü ̾ذ Ϻ ī ī, ī ¸ī Ͽ 1996⿡ ƴ. ݵü 濬 ǰ ȭ ݵü ü ̾ ǰ Ϻ ī ī ѱ 屸 ¾ ̴.

 

ϻ 濵 ̾ ڿ ǥ̻簡 Ѱϰ ٽ Ϻ 2 ٹϸ鼭 ϰ ִ. ȸ ű ֿ ǻ ̻ȸ Ͽ ϰ Ƿ Ϻ Ư 濵 ° ִٰ ƾ ̴. 

 

ǰ м

 

ǰ ݵü ֿ ִ ܰ ۸ Ű Ϸ(hot zone)  ֿ Ҹ 濬 ǰ ׶Ʈ ι SiC Coating SiC dummy wafer, Sic Cathode Electrode ݵü ǰ ǰ ũ ִ.

 

2005 ߽Ʈ, MEMC KOREA 48%, Zڿ ̴н  ǰϴ SiC 30%, Ÿ Ҹ ǰ 20% ϰ ִ.

 

(ڷ: Ƽ)

 

ǰ ݵü Ȳ ʴ´. ֳϸ ַ ǰ CZ puller 3~4 Ŀ üǴ Ҹ ǰ̰ SiC Wafer Ÿ ǰ鵵 ֱ ̴ Ҹ ǰ 귮 þ ü䰡 ߻ϱ ̴.

 

׸ 200 mm ۿ 300 mm 밡 ٲ ݵü Ȳ Ϲݱ 2007 MS Ÿ ݵü ȣȲ Ǵ Ǹ ϰ, 濬 ׶Ʈ ޸ Ȳ̱ ̴.

 

ռ ڸ Ȯ

 

׶Ʈ ǰ ڿ ¿ 濬 ȭ ¿ 濬 ¿ Ҽ ִ ܰ踦 CVD-SiCο ȭб Ͽ ȭй ñ Ϸ ó ǰ ´ , , ȭ ǰ ϼȴ. 

 

Ƽ̴ ̷ Ϸ 濬 ǰ ϰ ó ִ ϰ Ȯϰ ִ. ȭ 1 ȣⰡ ǰ ְ, ȭ 2ȣ⵵ 27 ڷ 谡 2006 Ϲݱ⿡ 󰡵 ȹϰ ִ. ̸ CZ 120, CVD 57 ߰ ȴ.

 

̹ ǰ ִ CVD-SiC 1,2,3 ȣ ̴. ̷ Ϻ зǾ ѵǰ ִ 쿡 ʱ⿡ 쿩 ־ٰ ϹǷ 庮 ۿϰ ִ.

 

ֿ ǰ ü ŷ 60~80 % ̸ ̰ ְ, Ϻ ǰ Ϻ 迡 ǰ ݿ ־ Ϻǰ 10~20% ̾ ް ִ Ȳ̴. ̵ ǰ Ϻ 꿡 1~2 ð ҿǰ ߻ϹǷ óԴ ŷ ƴϴ. ʱ ī ī ִ ޾Ұ, ̾ 濵 鼭 LG Ʈ, SEC ο ִ ȭ ǰ ִ ¿ ռ ֱ ǴܵǴ. 

 

ǰüμ ǰ ų ٴ ̴. õ ǰ ̴ Ϻ ǥ ǰ ѵ ̰, ü ȭǰ ȭǴ ǰ Ư ܰ ¿ ͼ Ǵ ̷ ִ.

 


 

 

ǰܰ ǰ 50% ϰ ִ. ͷ ֱ 4Ⱓ 20% ̻ ġ ̰ , ߼ Ͽ 2006 1б⿡ 29.4% ̸ٴ ̷ ޹ħϴ ̸, ȸó ٰ ü з ϱ ȸ ҵ ͷ ɼ ũٴ ؾ Ѵ.  

 

Ϻ 濵

 

Ư¡ ITǰüӿ ұϰ ں(CAPEX) 5 15£ Ұϰ Ȱ 帧 2 30 ϰ ִٴ ̴. 2002 CAPEX CVD-SiC Կ ԰ 󰡵 1.5 Ŀ ٷ Ǿ ִ. ׸ŭ źźϿ ӵǰ ִ ִ.

 

 

ݱ⸻ ڻ 20 , ܱǰ 42, ܱŸ 40 ݼ ڻ 102 ̸, ä 52 ̸, ڻ 14 11 ̹Ƿ ݼ ڻ 166 ̸, 12, ǹ 41 ִ. ڻ갡ġ ε 219 ִ.

 

ϳ ۿ κ ڻ κ ϰ ִ ġ 108 77 ٴ ̴. ׸ ڻ ܿ 1õ 7 ڻ ü ϴ.

 

, 2001 ׿ ̴ ȭ ̰ ִ ŷ ι  ϳ.

 

輼(shkim@viptooza.com)






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