24 Ϻ ΰ ȭƮƮ(ɻ ) ѱ ϴ ȿ ǰ Ѵ. ̷ ȭƮƮ ѱ ִ ָؾ Ѵٴ м Դ.
ѱ ڼҿ ѱ ȭƮƮ Ǹ ݵü, ÷ ߰ Ÿ Ӹ ƴ϶ ٸ ȥ ʷ ִٰ ߴ.
Ϻ 1120 263 㰡 ǰ ־. ̹ ȭƮƮ ȴٸ ΰǰ 857 㰡 ȴ.
ȭƮƮ Ǵ ؿ, ̺ϷƮ, APSȦ, ȿ žҴ.
ؿ ũ ũ, ̺ϷƮο APSȦ Ż ũ ǰ ߴٴ ̴. źҼ ǰ ȿ ִٰ Ǵߴ. ݸ ڿܼ(EUV) ũũ ұ(Lithography) ü ľߴ.
Ư ǰ ܿ , ߿ ʿ Ե Ϻ ǥ ʿϴٰ ٿ.
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