ż ַ ǰ TCO Ÿ(TCO Target), CMP (CMP Slurry) ̲ ̴. 27 ǥ Ʈ 34% 700, 31% þ 115̴.
TCO Target Ȯ Ӹ ƴ϶ ䷮ ߴ. TCO Target ַ ÷ Ǵµ ITO Ѵ. ֱ ȿ ¾籤 г Ȯ ̴.
ݵü ̼ȭ CMP Slurry ䷮ ߴ. CMP Slurry ݵü İ Ǵ Cabot Microelectronics CMP Slurry ӵ ̰ ֱ ̴.
27 9 46 ż 1.66% 18350 ̴. ð ðѾ 1991 115 17.
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