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[м] ũ, 5 ͷ 44%..?

ܵ
| Ʒ м 2016 3 24 ġŬ ̾ ȸ ڷԴϴ. 𵨰 ǰ ظ ̱ Ϲ ȸԵ մϴ. Ҹż Ҹŵ Ģ Ÿų ϴܿ Բ ϴ, ڿ Ͻø ڽϴ.

* ۼ ÿʹ 6 ֽϴ. Ʒ õ մϴ.
ũ(084370): ݵü  ü, ڸ


̵

1. Ը , ȭ
2. ֿ ŷó ö, ALD


ũ 2000 1 ݵü ü. 2015 ȸ ֽ 35.5% ǥ ִִ. ǥ SK̴н ݵü ο R&D þҴ. ȸ縦 ũ ߴ.


 ʱ⿣ ̴н ǰߴ. 2007 LP CVD ϱ ߰, SK̴н Zڸ ó ΰ ִ. 2015 ̴н 57%, Z 43%.


ֿ ǰ ö LP CVD. ǰ ݵü () ȴ. ݵü Ǹ ȭ ϰ(ȭ ), ݵü ȸθ (~̿), , ݼӹ輱 ĪѴ. ̵ ݺ ݵü ȴ. ũ ö , LP CVD ȭ, ȴ.


ݵü , ũ ش Ưȭ ü. ö 2D NAND ȭ ȭ , 3D NAND ݵü еȭ ȴ. LP CVD NAND DRAM ̼ .

[ǥ] ݵü ǥ
 
(ڷ: ѱ ݵü ȸ)


Zڿ SK̴н ȹ ũ. 2012 LP CVD ǰ 1683 2014⿣ 784 ϱ⵵ ߴ. ؿ ö ޷ 947(+20%, ), 186(+50%) ŵ״.


ͷ 15% ̻ ߴ. 1000 ̻ 2011~2013⿣ 30% ܷ ߴ.


[ǥ] ũ
 
(ڷ: , ũ)


2016 , б Ը 2


2016 ð þ . 5̸, Zڿ 3, SK̴н 2̴. Z ǰݾ 281, ö ̴. SK̴н ǰݾ 323, LP CVD κ̴. ö Ҿ Ե Ȯεȴ.


[ǥ] ũ 2016
 
(ڷ: , ũ)


2016 1б Ѿ 604̴.  2011 4б⿡ 647 ְ ݾ̴. ũ κ 1 ̳ ǰϸ, ʾ Ϸκ 1б ̳ ϷѴ. 1б⿡ 5 κ 3 ǰ ľǵȴ.


Ը ø , ũ ݱ ȣ ŵ ̶ ǿ ǽ . ü 2б Ŀ ָ ̾ ִ° ߵƴ. Ⱓ Ը ݾ پ , ص ߻ ǹ .


[ǥ] ũ б⺰ ݾ
 
(ڷ: , ũ)


̿ ũ ǰ ֱ ݵü , ֱ ΰ ߰ ɼ Ѵ.


Single Ÿ LP CVD , ̼ȭ


LP CVD ݵü CVD(ȭб) Ǵ . CVD Ǵ ũ LP CVD PE CVD, ALD ִ.


ݵü ̼ȭɼ ڸ ϰ ڸ⵵ ϴ ߿ϴ. 30nm ̻ 꼺 PE CVD , ڸ ϵ ϴ ̼ȭ LP CVD 䰡 .

ALD ϵ 꼺 װ ʾҴ. ֱٿ 꼺 ALD ߵ, 3D NAND 꿡 ̴. ũ ALD ǰ ϰ , ̾ ʾҴ.


[ǥ] CVD
 
(ڷ: , ũ, ڷ )


LP CVD ٽ Batch Single Ÿ . ũ ǰ Single Ÿ̴. 迡 θ ̴ Batch İ ޸, ũ ʱ Single Ÿ Դ. Batch ְ 150 ۸ ѹ ó ִ ݸ, Single ȸ 1 ۿ .


Batch 800 ̻ ¿ ð ϴ , ȭ ݵü ߻Ѵ. , 100 ̻ ڸ ϱ Single ϵ .


, ̼ȭ 䱸Ǵ ڸ ϵ, ۾ ð ũ ϴ Single Ÿ LP CVD ϴ. 2011 Ϲݱ~2012 ݱ, Zڿ SK̴н NAND ι 30nm޿ 20nm ̼ȭ, ũ LP CVD 뷮 ߴ.


[ǥ] ũ LP CVD
 
* 2016 1б ݾ
(ڷ: , ũ)


2015, Zڰ 20nm ̼ȭ , ũ ش ǰ ߴ. , ũ ؿ 簡 Zڿ ˷. ̷ 2015 LP CVD 368 ߴ.


2016⿡ 1б⿡ 323 ָ ´.  װ ¸Դ Ը. ̴  SK̴н ̴. 迡 2015 SK̴н DRAM ݵü 21nm 5% ̸̴. Z 20nm 60%, ũ 20nm 20% .


SK̴н 2016 21nm Ȯ븦 ڿ ִ. 2016 SK̴н DRAM ڿ 40޷(46000, 3 23 ȯ ) ̶° ̴. 30% ݾ̴. а SK̴н 21nm DRAM ȹ ũ LP CVD ⿡ ū ĥ ̴.


[ǥ] ũ ŷó DRAM
 
(ڷ: )


NAND, ̼ȭ 3D.. LP CVD ַ


NAND DRAM 4 ռ 2011 ̹ 20nm ȯ Ϸƴ. 10nm ̼ȭ , Ѱ ߰ ̼ȭ ˷. ̷ Zڴ 2013 3D NAND ߿ , 2014⿣ ߴ. 2015 NAND 귮 3D NAND 20%. SK̴н, ũ Ÿ ü 3D NAND 꿡 ̴.


NAND ִ ȸθ ־. ȸ ʹ ̻ ̼ȭ , ȸθ ׾ ߴ.


Zڰ 3D NAND 48 . 64 3D NAND ǥ ϰ ִ. ȸθ ״ ߿. ӵ ϰ, ϰ ׾ƾ Ѵ. ̷ LP CVD ӵ PE CVD, ϵ ALD δ.


߱ 忡 3D NAND ϰ ִ Zڴ IPSκ ALD, ׽ PE CVD ޹޴´.  ũ LP CVD, ALD 뵵 ʾҴ.


ũ Ϲݱ 3D NAND 꿡 ϴ SK̴н ALD ϰڴٴ ȹ̴. SK̴н 踦 ALD ְ ȴ.


3D NAND, ö


3D NAND ȯ 2015 ö ũ þ. ö 3D NAND ȭ е ̴ Ե ̴. 2015 Zڰ 3D NAND ο ũ ö ǰƴ.

[ǥ] ũ ö
 
* 2016 1б ݾ
(ڷ: , ũ)


ش 1б⿡ 281 ָ ߴ. Z 3D NAND ο ޵ȴ. 4б SK̴н 48 3D NAND ȹϰ ִ ϸ, 2б~3б SK̴н ö ɼ . Ҿ 2017 Z ð ϰ Ϲݱ⿡ ̴. ߹ݱ ö ְ ȴ.


LP CVD 밨 .. ö, ALD

LP CVD ߰ ֿ 밨 . ̹ Zڰ DRAM 20nm ̼ȭ ȯ Ϸ߰, NAND 3D ϰ ֱ ̴. ű ŷó ߱ ʴ ̻, SK̴н DRAM 21nm ڿ ۿ .


ö Ȳ ̴. Z ߱ þȰ 3D NAND ο ö ߰, þȰ ߰ ڷ ֵ ´. Z ġ Ȯߴٰ ִ. 2017 ڰ Ǵ ð 3D NAND ֵ ϴ.


Ҿ ٽ ŷó SK̴н 3D NAND ̴. κ SK̴н ϰ, SK̴н ߴ ϸ, ö, ALD ɼ .


ݱ Ը ַ Ϲݱ ȭ ִ. ֿ ŷó 3D NAND Ȯ, а 2013~2015 ְ δ.


, 3 22 ߱ Ŀ(ȸ ݵü 길 ϴ ü) XMC ߱ ο ΰ յ ݵü ´ٰ . XMC 2017 ǥ ϰ ִ. XMC ǰ 3D NAND, ɷ 20 ƴ. Z þȰ ɷ(10) .


ũ ö ALD ַ XMC ֿ غ ̶ . Ը ְ Ǵ ŭ, üũ ̴.


ڻ

ũ ڻа ġâ 캸. ڻ âϴ ٽڻ ľϰ,  ڻ ޴ ִ.

<Ŭϸ ũ >


ֹ ǰ , ǰ 1 κ ǰ εѴ. ä ǰ 90%, ˼ Ϸ 10% ȸѴ. ä κ 1 Ϸȴ. ̷ , Ϲ ü鿡 äǰ ڻ .

2015 (ݼڻ+ܱڻ-Ա) 1374 ̴. ̴ ڻ 2019 68%, 3 23 ðѾ 3277 42% شѴ. ڻ ų 20 ̻ ŵд.

> Ÿų ------------------------------------------------------------------------

ũ 2016 1~3 Ը ް ø ǥߴ. , 밨 ұϰ, ְ ū . Ϲݱ ְ پ ̶ ݿ ̴.

̾ 񽺴 ݵü Ȳ ũ ֿ ŷó м , Ϲݱ ҿ ϴٰ Ǵߴ. ̿, ʿ ũ żߴ.

2016 9 8 ũ Ʈ ԰ 46.5% ߴ. Zڿ SK̴н 3D NANDڰ Ϲݱ ȭ ̶ ҽ 鼭, ũ ݵü ü ְ ū ö. ̾ 񽺴 ߺ м Ϲݱ~ ݱ ݵü ڰ þ ߰, ũ Ʈ ū ŵ״.

 ְ ũ ʿ  κ ͽ ߴ. ҷ ݵü Ȳ ũ ̸ ϰ Ÿ Ǵ ̴. ũ ġ ְ ٰ Ǵϸ, ٽ Ȯ ִ. Ÿźа ũ ͷ 44.5%.

[ǥ] ̾ ũ Ÿų


* 14550 űԸż(2016.03.22)
* 14350 ߰ż(2016.03.23)
* 14000 ߰ż(2016.05.02)

* 18600 1 ͽ(2016.07.21)

* 2900 2 ͽ(2016.08.08)
* 21700 3 ͽ(2016.08.24)
- 2016 9 8 ͷ 44.5%

Ʈ

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