| ' º' ˷ 췮 ߿ ܱ, 'ū' ڵ Ȯϴ ֽ ڿ մϴ. Ϸ翡 ºθ ƴ ú ɱǿ δ ȰϽñ ٶϴ.
ܱ ڰ ũ ż Ÿ . 11 Ǿ迡 ܱ ڴ ü ż ߴ. 10.4% 2 10 23.2% 13%p ´.
ũ ְ 4 21000 뿡 15000 ´. ݸ Ⱓ ܱ 15.5% 23.2% 8%p ø 'ڼ' ߴ. ż ȭ ְ 13000 ɾҴ 9 ̴.
ܱ ڰ ż ֱ ǰ Դ .
26 KDB Ȳȣ " ũ 54% þ 1282, 108% 330 " ߴ. Ȳ "̴н NAND ̼ȭ ڰ ӵǰ, ű SEG Ϲݱ " ߴ. , "Z 3D ڿ ְ ̷ " ߴ.
ũ ߴ. 3б 634 10% ٰ, 34% 139 ߴ. 2013 ֿ ݵü ü ̼ ȯ Ȱ ߴ ȿ Z 3D NAND ȯ ְ ſ̴. ũ ̼ ȯ Ưȭ NAND 3D NAND Ȯ ü .
ũ ̼ ȯ ü ֿ ȭǴ ũ ϰ SEG غ Դ. ܰ ٸ 2 ˷ ִ. ۷ι ü AMAT ϰ ִ SEG 忡 Ѵٸ ̴ ȴ.
ũ 2000 2006 ڽڿ ƴ. ݵü ֿ Ѵ. ݵü õ LP CVD, Cylic CVD(ALD), Plasma ַ Ѵ.
ֽMRI м , 2%
ڰ ֽMRI м ũ ŷµ 25 19 ü 36( 2%) ߴ.
ֿ ϸ 繫 ̴.
̼ 0 Ҵ. PER 14 5 10.7躸 ݿƴ. PER ۳ 3б ȯ (ֱ 4 б ջ) ġ.
ֽMRI ڿ ü ǽð м . MRI ͼ强 繫 Ӹ ƴ϶ Ӽ ִ ° ְ ر Բ ǴѴ. ֽMRI 25 ְ ̸ 췮 ̴. 5 ΰ · Ÿ.
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